TORRI multi-stage rotary lobe vacuum pumps are the compact and energy-efficient solution for pump-down of load lock chambers.
They are characterized by low ultimate pressure and best-in-class chamber pump-down time.
The compact and energy-efficient solution for load lock chambers
– Low vibration and noise levels
– Light-weight
– Small size
– Dry and contact-free operating principle
– Long service life
– Low total cost of ownership
